We quantitatively interpret HAADF-STEM images of SrRuO3/ Pr0.7Ca0.3MnO3 (SRO/PCMO) superlattices. The images were taken in a probe-corrected (cs¼0) FEI microscope at 300 kV. The specimen thickness is estimated by comparing experimental and simulated Z-contrast ratios. The intermixing at the interfaces is different for the growth of SRO on PCMO and that of PCMO on SRO. In addition, the thermal stability of SRO/PCMO superlattices is studied by HAADF-STEM, based on a series of annealing experiments.